UNI EN ISO 14644-10 : 2013

Superseded

Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION

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Superseded date: 14-07-2022

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Published date: 03-04-2013

Publisher: Ente Nazionale Italiano di Unificazione (UNI)

Table of Contents - (Show below) - (Hide below)

Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Measuring and monitoring the cleanliness of
  surfaces for chemical contamination and
  demonstration of compliance
Annex A (informative) - Conversion between different
        unit expressions of surface concentration for
        chemical substances
Annex B (informative) - Parameters influencing testing
        and interpretation of results
Annex C (informative) - Essential considerations for
        a good cleanliness assessment
Annex D (informative) - Methods for testing surface
        cleanliness by chemical concentration
Annex E (informative) - Test record documentation
Bibliography

Abstract - (Show below) - (Hide below)

This part of ISO 14644 covers the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.

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Committee	CT 44
Document Type	Test Method
ISBN
Pages
Published
Publisher	Ente Nazionale Italiano di Unificazione (UNI)
Status	Superseded
Superseded By	UNI EN ISO 14644-10:2022
Supersedes	UNI EN ISO 14644-8 : 2007

International Equivalents – Equivalent Standard(s) & Relationship - (Show below) - (Hide below)

Equivalent Standard(s)	Relationship
ISO 14644-10:2013	Identical
EN ISO 14644-10:2013	Identical

Standards Referencing This Book - (Show below) - (Hide below)

SEMI E46 : 2007	TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
ISO 17052:2007	Rubber, raw Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography Thermal desorption (dynamic headspace) method
ISO 14644-6:2007	Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 14644-8:2013	Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO 18115-1:2013	Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy
ISO 18116:2005	Surface chemical analysis Guidelines for preparation and mounting of specimens for analysis
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 10312:1995	Ambient air Determination of asbestos fibres Direct transfer transmission electron microscopy method
ISO 14644-9:2012	Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration

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