UNI EN ISO 14644-9:2022
Current
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration
Published date
07-07-2022
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This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.
| Committee |
ISO/TC 209
|
| DocumentType |
Standard
|
| PublisherName |
Ente Nazionale Italiano di Unificazione (UNI)
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| EN ISO 14644-9:2022 | Identical |
| ISO 14644-9:2022 | Identical |
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