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  • VDI/VDE 2655 Blatt 1.1:2008-03

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    Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement

    Available format(s):  Hardcopy, PDF

    Superseded date:  02-02-2024

    Language(s):  German - English

    Published date:  01-03-2008

    Publisher:  Verlag des Vereins Deutscher Ingenieure

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    Table of Contents - (Show below) - (Hide below)

    Preliminary note
    Introduction
    1. Scope
    2. Terms and definitions
    3. Symbols and subscript symbols
    4. Properties of the interference microscope
    5. Reference standards and calibration methods
    6. Report of results of instrument calibration
    7. Measurement uncertainty
    Bibliography

    Abstract - (Show below) - (Hide below)

    This guideline VDI/VDE 2655 Part 1.1 applies to interference microscopes for measuring the topography of technical surfaces.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher Verlag des Vereins Deutscher Ingenieure
    Status Superseded
    Superseded By
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    EN ISO 25178-604:2013 Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)
    UNI EN ISO 25178-604 : 2013 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS
    ISO 25178-604:2013 Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
    DIN EN ISO 25178-604:2013-12 GEOMETRICAL PRODUCT SPECIFICATION (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS (ISO 25178-604:2013)
    VDI/VDE 2656 Blatt 1:2008-06 Determination of geometrical quantities by using of Scanning Probe Microscopes - Calibration of measurement systems
    BS EN ISO 25178-604:2013 Geometrical product specifications (GPS). Surface texture: Areal Nominal characteristics of non-contact (coherence scanning interferometry) instruments

    Standards Referencing This Book - (Show below) - (Hide below)

    EN ISO 4287:1998/A1:2009 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - TERMS, DEFINITIONS AND SURFACE TEXTURE PARAMETERS
    VDE-VDI 2604 : 1971 SURFACE MEASURING METHODS; ROUGHNESS ANALYSIS BY MEANS OF INTERFERENCE MICROSCOPY
    ISO 12179:2000 Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments
    ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
    EN ISO 4288 : 1997 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - RULES AND PROCEDURES FOR THE ASSESSMENT OF SURFACE TEXTURE
    EN ISO 12179:2000/AC:2008 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - CALIBRATION OF CONTACT (STYLUS) INSTRUMENTS
    EN ISO 11562:1997/AC:2008 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
    DKD-R 4-2 : 1991 CALIBRATION OF STYLUS INSTRUMENTS
    VDI 1000:2017-02 VDI Standardisation Work - Principles and procedures
    ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
    ISO 12853:2015 Microscopes Information provided to the user
    ISO 5436-1:2000 Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
    DIN EN ISO 11562:1998-09 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
    EN ISO 3274 : 1997 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - NOMINAL CHARACTERISTICS OF CONTACT (STYLUS) INSTRUMENTS
    EN ISO 5436-1 : 2000 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD; MEASUREMENT STANDARDS - PART 1: MATERIAL MEASURES
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