Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components
of a coherence scanning interferometry
(CSI) microscope
Annex B (informative) - Coherence scanning interferometry
(CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography