Comment Closes On
|
|
Committee
|
EPL/47 |
Document Type
|
Draft |
ISBN
|
|
Pages
|
|
Published
|
|
Publisher
|
British Standards Institution
|
Status
|
Superseded |
Superseded By
|
|
IEC 62047-2:2006
|
Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
ISO 15490:2008
|
Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for tensile strength of monolithic ceramics at room temperature |
IEC 62047-1:2016
|
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |
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