15/30291643 DC : 0

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Guide on how to use this standard
6 Determination of image sharpness
7 Determination of effective lateral resolution by imaging
  of gratings
8 Reporting results
Annex A (informative) - The relation between sharpness parameters
        and effective lateral resolution
Annex B (informative) - Straight edge method: Systematic
        underestimation of D[12-88] caused by insufficient
        plateau length L[pl]
Annex C (informative) - Straight edge method: Required length
        ranges for L[ESF]
Annex D (informative) - Straight edge method: The
        uncertainty of D[12-88]
Annex E (informative) - Narrow stripe method: Systematic
        overestimation of w[LSF] caused by
        inappropriately large widths w[s] of the imaged stripe
Annex F (informative) - Narrow stripe method: The uncertainty
        of w[LSF]
Annex G (informative) - Imaging of square gratings: Reduction
        of image period for 3-stripe gratings
Annex H (informative) - Imaging of square gratings: Relation
        between signal-to-noise ratio and effective lateral resolution
Annex I (informative) - Imaging of square gratings: Minimum number of
        sampling points per period
Annex J (informative) - Imaging of square gratings: Uncertainty of re
        determined by visual inspection of an image or linescan over
        a series of gratings
Annex K (informative) - Imaging of square gratings: Uncertainty of
        re determined by interpolation - extrapolation
Annex L (informative) - Determination of lateral resolution by imaging
        of square gratings - Practical example for SIMS
Bibliography