ASTM F 1513 : 1999 : R2003
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications
Hardcopy , PDF
11-11-2014
English
10-12-1999
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL. 10.04, 2015 Defines pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets.
| Committee |
F 01
|
| DocumentType |
Standard
|
| Pages |
2
|
| ProductNote |
Reconfirmed 2003
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
1.1 This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example, as e-beam evaporation sources). In other instances it may be remelted, alloyed, cast and processed by the purchaser to make finished products (for example, sputtering targets).
1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging.
1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
| ASTM D 1971 : 2016 : REDLINE | Standard Practices for Digestion of Water Samples for Determination of Metals by Flame Atomic Absorption, Graphite Furnace Atomic Absorption, Plasma Emission Spectroscopy, or Plasma Mass Spectrometry |
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