ASTM F 76 : 2008 : R2016 : EDT 1
Current
The latest, up-to-date edition.
Standard Test Methods for Measuring Resistivity and Hall Coefficient and Determining Hall Mobility in Single-Crystal Semiconductors (Withdrawn 2023)
Hardcopy , PDF
English
16-05-2017
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL. 10.04, 2016 Defines two procedures for measuring the resistively and Hall coefficient of single-crystal semiconductor specimens.
| Committee |
F 01
|
| DocumentType |
Test Method
|
| Pages |
14
|
| ProductNote |
Reconfirmed EDT 1
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Current
|
| Supersedes |
1.1These test methods cover two procedures for measuring the resistivity and Hall coefficient of single-crystal semiconductor specimens. These test methods differ most substantially in their test specimen requirements.
1.1.1Test Method A, van der Pauw(1) 2—This test method requires a singly connected test specimen (without any isolated holes), homogeneous in thickness, but of arbitrary shape. The contacts must be sufficiently small and located at the periphery of the specimen. The measurement is most easily interpreted for an isotropic semiconductor whose conduction is dominated by a single type of carrier.
1.1.2Test Method B, Parallelepiped or Bridge-Type—This test method requires a specimen homogeneous in thickness and of specified shape. Contact requirements are specified for both the parallelepiped and bridge geometries. These test specimen geometries are desirable for anisotropic semiconductors for which the measured parameters depend on the direction of current flow. The test method is also most easily interpreted when conduction is dominated by a single type of carrier.
1.2These test methods do not provide procedures for shaping, cleaning, or contacting specimens; however, a procedure for verifying contact quality is given.
Note 1:Practice F418 covers the preparation of gallium arsenide phosphide specimens.
1.3The method in Practice F418 does not provide an interpretation of the results in terms of basic semiconductor properties (for example, majority and minority carrier mobilities and densities). Some general guidance, applicable to certain semiconductors and temperature ranges, is provided in the Appendix. For the most part, however, the interpretation is left to the user.
1.4Interlaboratory tests of these test methods (Section 19) have been conducted only over a limited range of resistivities and for the semiconductors, germanium, silicon, and gallium arsenide. However, the method is applicable to other semiconductors provided suitable specimen preparation and contacting procedures are known. The resistivity range over which the method is applicable is limited by the test specimen geometry and instrumentation sensitivity.
1.5The values stated in acceptable metric units are to be regarded as the standard. The values given in parentheses are for information only. (See also 3.1.4.)
1.6This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
1.7This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
| ASTM D 1125 : 2014 | Standard Test Methods for Electrical Conductivity and Resistivity of Water (Withdrawn 2023) |
| ASTM E 2554 : 2013 | Standard Practice for Estimating and Monitoring the Uncertainty of Test Results of a Test Method Using Control Chart Techniques |
| ASTM F 26 : 1987 : REV A : R1999 | Standard Test Methods for Determining the Orientation of a Semiconductive Single Crystal (Withdrawn 2003) |
| ASTM E 2554 : 2018 : EDT 1 | Standard Practice for Estimating and Monitoring the Uncertainty of Test Results of a Test Method Using Control Chart Techniques |
| ASTM D 1125 : 1995 : R1999 | Standard Test Methods for Electrical Conductivity and Resistivity of Water |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
| ASTM E 2554 : 2007 | Standard Practice for Estimating and Monitoring the Uncertainty of Test Results of a Test Method in a Single Laboratory Using a Control Sample Program |
| ASTM D 1125 : 2014 : REDLINE | Standard Test Methods for Electrical Conductivity and Resistivity of Water (Withdrawn 2023) |
| ASTM E 2554 : 2018 | Standard Practice for Estimating and Monitoring the Uncertainty of Test Results of a Test Method Using Control Chart Techniques |
| ASTM D 1125 : 1995 : R2005 | Standard Test Methods for Electrical Conductivity and Resistivity of Water |
| ASTM E 2554 : 2013-05 | PRACTICE FOR ESTIMATING AND MONITORING THE UNCERTAINTY OF TEST RESULTS OF A TEST METHOD USING CONTROL CHART TECHNIQUES |
| ASTM D 1125 : 2023 | Standard Test Methods for Electrical Conductivity and Resistivity of Water |
| ASTM F 43 : 1999 | Standard Test Methods for Resistivity of Semiconductor Materials (Withdrawn 2003) |
| ASTM F 47 : 1994 | Test Method for Crystalographic Perfection of Silicon by Preferential Etch Techniques (Withdrawn 1998) |
| ASTM D 1125 : 1995 : R2009 | Standard Test Methods for Electrical Conductivity and Resistivity of Water |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.