BS EN ISO 14644-10:2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration
Hardcopy , PDF
13-07-2022
English
30-04-2013
Important note : Users cannot be edited or removed once added to your Multi user PDF.| Committee |
LBI/30
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| DevelopmentNote |
Supersedes 11/30196563 DC. (04/2013)
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| DocumentType |
Standard
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| Pages |
40
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| PublisherName |
British Standards Institution
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
This part of ISO14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
NOTE 1 For the purpose of this part of ISO14644, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this part of ISO14644 does not cover the interaction between the contamination and the surface.
NOTE 2 This part of ISO14644 does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.
| Standards | Relationship |
| EN ISO 14644-10:2013 | Identical |
| ISO 14644-10:2013 | Identical |
| SEMI E46 : 2007 | TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS) |
| ISO 17052:2007 | Rubber, raw Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography Thermal desorption (dynamic headspace) method |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| ISO 18115-1:2013 | Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy |
| ISO 18116:2005 | Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis |
| ISO 10312:1995 | Ambient air Determination of asbestos fibres Direct transfer transmission electron microscopy method |
| ISO 14644-9:2012 | Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration |
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