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BS EN ISO 14644-2:2015

Current

Current

The latest, up-to-date edition.

Cleanrooms and associated controlled environments Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-01-2016

€231.38
Excluding VAT

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Creating, implementing and maintaining a
  monitoring plan
5 Periodic classification of air cleanliness by
  particle concentration
Annex A (informative) - Matters to consider when
        developing a monitoring plan
Annex B (informative) - Considerations for setting
        alert and action levels
Bibliography
National Annex NA (informative) - Guidance on maximum
                  time intervals for periodic testing of
                  cleanrooms and clean zones

Provides requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

Committee
LBI/30
DevelopmentNote
Supersedes BS 5295-4(1989) (11/2000) Supersedes 98/123943 DC (03/2002) Supersedes 10/30152881 DC. (02/2016)
DocumentType
Standard
Pages
26
PublisherName
British Standards Institution
Status
Current
Supersedes

This part of ISO14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

This part of ISO14644 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1µm to 5µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

PD 6609:2007 Environmental cleanliness in enclosed spaces. Guide to in situ high efficiency filter leak testing

ISO 31000:2009 Risk management Principles and guidelines
ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
ISO 21501-4:2007 Determination of particle size distribution Single particle light interaction methods Part 4: Light scattering airborne particle counter for clean spaces

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