BS EN ISO 14644-3:2005
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Cleanrooms and associated controlled environments Test methods
Hardcopy , PDF
19-06-2020
English
20-12-2005
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Airborne particle measurement
3.3 Air filters and systems
3.4 Airflow and other physical states
3.5 Electrostatic measurement
3.6 Measuring apparatus and measuring conditions
3.7 Occupancy states
4 Test procedures
4.1 Cleanroom tests
4.2 Principle
5 Test reports
Annex A (informative) Choice of recommended tests of
an installation and the sequence in which to
carry them out
Annex B (informative) Test methods
Annex C (informative) Test apparatus
Bibliography
Describes test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.
| Committee |
LBI/30
|
| DocumentType |
Standard
|
| Pages |
76
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| UNE-EN ISO 14644-3:2006 | Identical |
| UNI EN ISO 14644-3 : 2006 | Identical |
| ISO 14644-3:2005 | Identical |
| NEN EN ISO 14644-3 : 2006 | Identical |
| I.S. EN ISO 14644-3:2006 | Identical |
| EN ISO 14644-3:2005 | Identical |
| SN EN ISO 14644-3 : 2006 | Identical |
| NF EN ISO 14644-3 : 2006 | Identical |
| NS EN ISO 14644-3 : 1ED 2006 | Identical |
| DIN EN ISO 14644-3:2006-03 | Identical |
| NBN EN ISO 14644-3 : 2006 | Identical |
| ONORM EN ISO 14644-3 : 2006 | Identical |
| 12/30240811 DC : 0 | BS 8568 - CLEANROOM ENERGY - CODE OF PRACTICE FOR IMPROVING ENERGY EFFICIENCY IN CLEANROOMS AND CLEAN AIR DEVICES |
| PD 6609:2007 | Environmental cleanliness in enclosed spaces. Guide to in situ high efficiency filter leak testing |
| BS 8568:2013 | Cleanroom energy. Code of practice for improving energy efficiency in cleanrooms and clean air devices |
| ISO 5167-3:2003 | Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 3: Nozzles and Venturi nozzles |
| IEST RP CC007.1 : 1992 | TESTING ULPA FILTERS |
| ASTM F 328 : 1998 | Standard Practice for Calibration of an Airborne Particle Counter Using Monodisperse Spherical Particles |
| ASME N510 : 2007 | TESTING OF NUCLEAR AIR-TREATMENT SYSTEMS |
| ISO 14644-2:2015 | Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration |
| IEST RP CC006.3 : 2004 | TESTING CLEANROOMS |
| EN 12599:2012 | Ventilation for buildings - Test procedures and measurement methods to hand over air conditioning and ventilation systems |
| ISO 7726:1998 | Ergonomics of the thermal environment — Instruments for measuring physical quantities |
| ISO 5167-4:2003 | Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 4: Venturi tubes |
| SEMI E14 : 1993 | MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL |
| EN 1822-2:2009 | High efficiency air filters (EPA, HEPA and ULPA) - Part 2: Aerosol production, measuring equipment, particle counting statistics |
| VDI 2083 Blatt 4:1996-02 | Cleanroom technology - Surface cleanliness |
| ISO 5167-2:2003 | Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 2: Orifice plates |
| IEST RP CC021.1 : 1992 | TESTING HEPA AND ULPA FILTER MEDIA |
| IEST G CC1001 : 1999 | COUNTING AIRBORNE PARTICLES FOR CLASSIFICATION AND MONITORING OF CLEANROOMS AND CLEAN ZONES |
| ISO 5167-1:2003 | Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 1: General principles and requirements |
| IEST G CC1003 : 1999 | MEASUREMENT OF AIRBORNE MACROPARTICLES |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| IEST G CC1002 : 1999 | DETERMINATION OF THE CONCENTRATION OF AIRBORNE ULTRAFINE PARTICLES |
| ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
| IEST RP CC001.3 : 1993 | HEPA AND ULPA FILTERS |
| IEST RP CC034.2 : 2005 | HEPA AND ULPA FILTER LEAK TESTS |
| EN 1822-4:2009 | High efficiency air filters (EPA, HEPA and ULPA) - Part 4: Determining leakage of filter elements (scan method) |
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