BS EN ISO 25178-603:2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Geometrical product specifications (GPS). Surface texture: Areal Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Hardcopy , PDF
English
31-10-2013
28-02-2025
Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) Components of a phase-shifting
interferometric (PSI) microscope
Annex B (informative) - Phase-shifting interferometric
(PSI) microscope - Theory of operation
Annex C (informative) - Errors and corrections for
phase-shifting interferometric (PSI) microscopes
Annex D (informative) - Relation to the GPS
matrix model
Bibliography
Defines the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
| Committee |
TPR/1
|
| DocumentType |
Standard
|
| Pages |
40
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
This part of ISO25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
| Standards | Relationship |
| ISO 25178-603:2013 | Identical |
| EN ISO 25178-603:2013 | Identical |
| ISO/TR 14638:1995 | Geometrical product specification (GPS) — Masterplan |
| ISO 8015:2011 | Geometrical product specifications (GPS) — Fundamentals — Concepts, principles and rules |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 14978:2006 | Geometrical product specifications (GPS) — General concepts and requirements for GPS measuring equipment |
| ISO 25178-6:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification of methods for measuring surface texture |
| ISO 10934-2:2007 | Optics and optical instruments — Vocabulary for microscopy — Part 2: Advanced techniques in light microscopy |
| ISO 14253-1:2017 | Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications |
| ASME B46.1 : 2009 | SURFACE TEXTURE (SURFACE ROUGHNESS, WAVINESS, AND LAY) |
| ISO 25178-3:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators |
| ISO/IEC Guide 99:2007 | International vocabulary of metrology — Basic and general concepts and associated terms (VIM) |
| ISO 25178-601:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments |
| ISO 25178-602:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments |
| ISO 25178-2:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions and surface texture parameters |
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