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SEMICONDUCTOR DEVICES - PART 14-3: SEMICONDUCTOR SENSORS - PRESSURE SENSORS
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Available format(s): Hardcopy, PDF
Language(s): English
Published date: 01-01-2009
Publisher: British Standards Institution
FOREWORDINTRODUCTION1 Scope2 Normative references3 Terminology and letter symbols 3.1 General terms 3.2 Definitions 3.3 Letter symbols4 Essential ratings and characteristics 4.1 General 4.2 Ratings (limiting values) 4.3 Characteristics5 Measuring methods 5.1 General 5.2 Output voltage measurements 5.3 Sensitivity (S) 5.4 Temperature coefficient of sensitivity (alpha[S]) 5.5 Temperature coefficient of full-scale span (alphaV[FSS]) and maximum temperature deviation of full-scale span (deltaV[FSS]) 5.6 Temperature coefficient of offset voltage (alphaV[OS]) and (deltaV[OS]) 5.7 Pressure hysteresis of output voltage (H[ohp]) 5.8 Temperature hysteresis of output voltage (H[ohT])Figure 1 - Basic circuit for measurement of output voltage
Provides requirements for semiconductor pressure sensors measuring absolute, gauge, or differential pressures.
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