BS ISO 17974:2002

Foreword
Introduction
1 Scope
2 Normative reference
3 Terms and definitions
4 Symbols and abbreviated terms
5 Outline of method
6 Procedure for calibrating the energy scale
   6.1 Obtaining reference samples
   6.2 Mounting samples
   6.3 Cleaning samples
   6.4 Choosing spectrometer settings for energy calibration
   6.5 Operating the instrument
   6.6 Options for initial or subsequent
        calibration measurements
   6.7 Measurements for peak kinetic energy
        repeatability standard deviation and scale linearity
   6.8 Calculating peak kinetic energy repeatability
        standard deviation
   6.9 Determining relevant reference kinetic energies
   6.10 Checking kinetic energy scale linearity
   6.11 Procedure for regular calibration error
        determination
   6.12 Procedures for correction of the instrument
        kinetic energy scale
   6.13 Next calibration
   6.14 Establishing calibration intervals
Annex A (normative) Maximum number of points for a
        single application of Savitzky and Golaya smoothing
        of peaks at 0,1 eV energy intervals
Annex B (normative) Least squares determination of peak
        kinetic energy by a simple computational method
Annex C (informative) Derivation of uncertainties
Annex D (informative) Citation of uncertainties of
        measured kinetic energy
        smoothing of peaks at 0,1 eV energy intervals
Bibliography

Defines method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces.

This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces. It also specifies a calibration schedule for testing the kinetic energy scale linearity at one intermediate energy, for confirming the uncertainty of the scale calibration at one low and one high kinetic energy value, for correcting for small drifts of that scale and for defining the expanded uncertainty of the calibration of the kinetic energy scale with a confidence level of 95%(this uncertainty includes contributions for behaviours observed in interlaboratory studies but does not cover all possible defects).

It is applicable only to those instruments incorporating an ion gun for sputter cleaning. It is not applicable to instruments with kinetic energy scale errors significantly non-linear with energy. Neither it is applicable to those instruments operated at relative resolutions poorer than 0,2%in the constant ΔE/E mode or 1,5 eV in the constant ΔE mode, those requiring tolerance limits of±0,05 eV or less, nor to those with an electron gun that cannot be operated in the energy range 5 keV to 10 keV. It does not provide a full calibration check for confirming the energy measured at each addressable point on the energy scale, this being performed according to the manufacturer\'s recommendations.