BS ISO 22493:2014
Current
The latest, up-to-date edition.
Microbeam analysis. Scanning electron microscopy. Vocabulary
Hardcopy , PDF
English
30-04-2014
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Foreword
Introduction
1 Scope
2 Abbreviated terms
3 Terms and definitions used in the physical
basis of SEM
4 Terms and definitions used in SEM instrumentation
5 Terms and definitions used in SEM image
formation and processing
6 Terms and definitions used in SEM image
interpretation and analysis
7 Terms and definitions used in the measurement
and calibration of SEM image
magnification and resolution
Bibliography
Describes terms used in the practice of scanning electron microscopy (SEM).
| Committee |
CII/9
|
| DevelopmentNote |
Supersedes 06/30128226 DC. (10/2008)
|
| DocumentType |
Standard
|
| Pages |
32
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Supersedes |
This International Standard defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO23833 also included, where appropriate.
This International Standard is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of this International Standard are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.
| Standards | Relationship |
| ISO 22493:2014 | Identical |
| ISO 10241:1992 | International terminology standards Preparation and layout |
| ISO 1087-1:2000 | Terminology work Vocabulary Part 1: Theory and application |
| ISO 18115-1:2013 | Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy |
| ISO 23833:2013 | Microbeam analysis — Electron probe microanalysis (EPMA) — Vocabulary |
| ISO 704:2009 | Terminology work — Principles and methods |
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