BS ISO 22493:2014

Foreword
Introduction
1 Scope
2 Abbreviated terms
3 Terms and definitions used in the physical
  basis of SEM
4 Terms and definitions used in SEM instrumentation
5 Terms and definitions used in SEM image
  formation and processing
6 Terms and definitions used in SEM image
  interpretation and analysis
7 Terms and definitions used in the measurement
  and calibration of SEM image
  magnification and resolution
Bibliography

Describes terms used in the practice of scanning electron microscopy (SEM).

This International Standard defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO23833 also included, where appropriate.

This International Standard is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of this International Standard are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.