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BS ISO 27894:2009

Current

Current

The latest, up-to-date edition.

Vacuum technology. Vacuum gauges. Specifications for hot cathode ionization gauges

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-03-2010

€217.36
Excluding VAT

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of hot cathode ionization gauge
6 Specifications for hot cathode ionization gauge to be
  provided by manufacturers
7 Additional (optional) specifications for hot cathode
  ionization gauge to be provided by manufacturers
8 Influences contributing to the measurement uncertainty
  with hot cathode ionization gauges
Annex A (informative) - Typical Bayard-Alpert gauge with a
        glass envelope
Annex B (informative) - Typical electrical connection of a
        Bayard-Alpert gauge
Annex C (informative) - Problems with ionization gauges
Bibliography

Describes terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.

Committee
MCE/8/-/4
DevelopmentNote
Supersedes 08/30182096 DC. (04/2010)
DocumentType
Standard
Pages
30
PublisherName
British Standards Institution
Status
Current
Supersedes

This International Standard defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges. The reasons for this are as follows. This International Standard updates some terms and definitions given in ISO3529-3:1981. This International Standard specifies information for suitable laboratories to correctly calibrate vacuum gauges under high and ultra-high vacua, since ionization gauges with hot cathodes are often used as reference standards. This information consists of the relevant parameters and characteristics suitable for quotation in manufacturers\' instructions to users employing ionization gauges for traceable measurement of pressure under high or ultra-high vacua. This International Standard also lists those uncertainties associated with the measurement of pressure by the ionization gauge, which are known to be significant, and gives guidelines on how to evaluate them. It is possible that the list is not comprehensive for some current or future vacuum gauges. This International Standard complements ISO/TS3567 and ISO/TS27893 when using ionization gauges as reference standards.

Standards Relationship
ISO 27894:2009 Identical

ISO/TS 27893:2009 Vacuum technology Vacuum gauges Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
ISO 3529-3:2014 Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges
ISO/TS 3567:2005 Vacuum gauges Calibration by direct comparison with a reference gauge
ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

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