BS ISO 27894:2009
Current
The latest, up-to-date edition.
Vacuum technology. Vacuum gauges. Specifications for hot cathode ionization gauges
Hardcopy , PDF
English
31-03-2010
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of hot cathode ionization gauge
6 Specifications for hot cathode ionization gauge to be
provided by manufacturers
7 Additional (optional) specifications for hot cathode
ionization gauge to be provided by manufacturers
8 Influences contributing to the measurement uncertainty
with hot cathode ionization gauges
Annex A (informative) - Typical Bayard-Alpert gauge with a
glass envelope
Annex B (informative) - Typical electrical connection of a
Bayard-Alpert gauge
Annex C (informative) - Problems with ionization gauges
Bibliography
Describes terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.
Committee |
MCE/8/-/4
|
DevelopmentNote |
Supersedes 08/30182096 DC. (04/2010)
|
DocumentType |
Standard
|
Pages |
30
|
PublisherName |
British Standards Institution
|
Status |
Current
|
Supersedes |
This International Standard defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges. The reasons for this are as follows. This International Standard updates some terms and definitions given in ISO3529-3:1981. This International Standard specifies information for suitable laboratories to correctly calibrate vacuum gauges under high and ultra-high vacua, since ionization gauges with hot cathodes are often used as reference standards. This information consists of the relevant parameters and characteristics suitable for quotation in manufacturers\' instructions to users employing ionization gauges for traceable measurement of pressure under high or ultra-high vacua. This International Standard also lists those uncertainties associated with the measurement of pressure by the ionization gauge, which are known to be significant, and gives guidelines on how to evaluate them. It is possible that the list is not comprehensive for some current or future vacuum gauges. This International Standard complements ISO/TS3567 and ISO/TS27893 when using ionization gauges as reference standards.
Standards | Relationship |
ISO 27894:2009 | Identical |
ISO/TS 27893:2009 | Vacuum technology Vacuum gauges Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge |
ISO 3529-3:2014 | Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges |
ISO/TS 3567:2005 | Vacuum gauges Calibration by direct comparison with a reference gauge |
ISO/IEC Guide 99:2007 | International vocabulary of metrology Basic and general concepts and associated terms (VIM) |
ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
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