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SEMICONDUCTOR DEVICES - MICROELECTROMECHANICAL DEVICES - PART 10: MICRO-PILLAR COMPRESSION TEST FOR MEMS MATERIALS
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Available format(s): Hardcopy, PDF
Language(s): English
Published date: 01-01-2012
Publisher: Comitato Elettrotecnico Italiano
FOREWORD 1 Scope 2 Normative references 3 Symbols and designations 4 Test piece 5 Testing method and test apparatus 6 Test reportAnnex A (informative) - Error estimation using finite element method BibliographyAnnex ZA (normative) - Normative references to international publications with their corresponding European publications
Describes the micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication.
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