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SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 10: MICRO-PILLAR COMPRESSION TEST FOR MEMS MATERIALS (IEC 62047-10:2011)
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Published date: 09-09-2011
Publisher: European Committee for Standards - Electrical
FOREWORD1 Scope2 Normative references3 Symbols and designations4 Test piece5 Testing method and test apparatus6 Test reportAnnex A (informative) - Error estimation using finite element methodBibliographyAnnex ZA (normative) - Normative references to international publications with their corresponding European publications
IEC 62047-10:2011 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication.
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