CEI EN 62047-15 : 2016
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
View Superseded by
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 15: TEST METHOD OF BONDING STRENGTH BETWEEN PDMS AND GLASS
Hardcopy , PDF
16-05-2019
English
01-01-2016
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Testing method
Bibliography
Annex ZA (normative) - Normative references to international
publications with their corresponding European
publications
Specifies test method for bonding strength between poly dimethyl siloxane (PDMS) and glass.
Committee |
CT 309
|
DevelopmentNote |
Classificazione CEI 47-125. (08/2017)
|
DocumentType |
Standard
|
Pages |
18
|
PublisherName |
Comitato Elettrotecnico Italiano
|
Status |
Withdrawn
|
SupersededBy |
Standards | Relationship |
IEC 62047-15:2015 | Identical |
EN 62047-15:2015 | Identical |
IEC 62047-9:2011 | Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS |
EN 62047-9:2011 | Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS |
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