DIN EN 62047-10:2012-03
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 10: MICRO-PILLAR COMPRESSION TEST FOR MEMS MATERIALS (IEC 62047-10:2011)
Available format(s)
Hardcopy , PDF
Language(s)
German
Published date
01-01-2012
| DevelopmentNote |
Supersedes DIN IEC 62047-10. (03/2012)
|
| DocumentType |
Standard
|
| Pages |
13
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Current
|
| Supersedes |
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