EN 62047-12 : 2011
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 12: BENDING FATIGUE TESTING METHOD OF THIN FILM MATERIALS USING RESONANT VIBRATION OF MEMS STRUCTURES (IEC 62047-12:2011)
21-10-2011
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test equipment
5 Specimen
6 Test conditions
7 Initial measurement
8 Test
9 Test report
Annex A (informative) - Example of testing using an
electrostatic device with an integrated actuation
component and displacement detection component
Annex B (informative) - Example of testing using an external
drive and a device with an integrated strain gauge
for detecting displacement
Annex C (informative) - Example of electromagnetic drive
out-of-plane vibration test (external drive
vibration test)
Annex D (informative) - Theoretical expression on fatigue
life of brittle materials based on Paris' law
and Weibull distribution
Annex E (informative) - Analysis examples
Bibliography
Annex ZA (normative) - Normative references to international
publications with their corresponding European
publications
IEC 62047-12:2011 specifies a method for bending fatigue testing using resonant vibration of microscale mechanical structures of MEMS (micro-electromechanical systems) and micromachines.
| Committee |
SR 47F
|
| DocumentType |
Test Method
|
| PublisherName |
European Committee for Standards - Electrical
|
| Status |
Current
|
| Standards | Relationship |
| PN EN 62047-12 : 2012 | Identical |
| DIN EN 62047-12:2012-06 | Identical |
| IEC 62047-12:2011 | Identical |
| BS EN 62047-12:2011 | Identical |
| NEN EN IEC 62047-12 : 2011 | Identical |
| CEI EN 62047-12 : 2012 | Identical |
| UNE-EN 62047-12:2011 | Identical |
| NF EN 62047-12 : 2012 | Identical |
| I.S. EN 62047-12:2011 | Identical |
| NBN EN 62047-12 : 2011 | Identical |
| PNE-FprEN 62047-12 | Identical |
| IEC 62047-2:2006 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
| IEC 62047-3:2006 | Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing |
| EN 62047-3 : 2006 | SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE TESTING |
| ISO 12107:2012 | Metallic materials — Fatigue testing — Statistical planning and analysis of data |
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