EN ISO 25178-603:2013
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)
02-10-2013
30-04-2014
Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) Components of a phase-shifting
interferometric (PSI) microscope
Annex B (informative) - Phase-shifting interferometric
(PSI) microscope - Theory of operation
Annex C (informative) - Errors and corrections for
phase-shifting interferometric (PSI) microscopes
Annex D (informative) - Relation to the GPS
matrix model
Bibliography
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
| Committee |
CEN/TC 290
|
| DevelopmentNote |
Supersedes PREN ISO 25178-603. (10/2013)
|
| DocumentType |
Standard
|
| PublisherName |
Comite Europeen de Normalisation
|
| Status |
Withdrawn
|
| Standards | Relationship |
| NEN EN ISO 25178-603 : 2013 | Identical |
| NS EN ISO 25178-603 : 2013 | Identical |
| DIN EN ISO 25178-603:2014-02 | Identical |
| I.S. EN ISO 25178-603:2013 | Identical |
| NBN EN ISO 25178-603 : 2013 | Identical |
| PN EN ISO 25178-603 : 2013 | Identical |
| BS EN ISO 25178-603:2013 | Identical |
| ISO 25178-603:2013 | Identical |
| NF EN ISO 25178-603 : 2013 | Identical |
| ONORM EN ISO 25178-603 : 2013 | Identical |
| DS EN ISO 25178-603 : 2013 | Identical |
| UNE-EN ISO 25178-603:2013 | Identical |
| ISO/TR 14638:1995 | Geometrical product specification (GPS) — Masterplan |
| ISO 8015:2011 | Geometrical product specifications (GPS) — Fundamentals — Concepts, principles and rules |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 14978:2006 | Geometrical product specifications (GPS) — General concepts and requirements for GPS measuring equipment |
| ISO 25178-6:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification of methods for measuring surface texture |
| ISO 10934-2:2007 | Optics and optical instruments — Vocabulary for microscopy — Part 2: Advanced techniques in light microscopy |
| ISO 14253-1:2017 | Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications |
| ASME B46.1 : 2009 | SURFACE TEXTURE (SURFACE ROUGHNESS, WAVINESS, AND LAY) |
| ISO 25178-3:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators |
| ISO/IEC Guide 99:2007 | International vocabulary of metrology — Basic and general concepts and associated terms (VIM) |
| ISO 25178-601:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments |
| ISO 25178-602:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments |
| ISO 25178-2:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions and surface texture parameters |
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