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SEMICONDUCTOR DEVICES - PART 1: TIME-DEPENDENT DIELECTRIC BREAKDOWN (TDDB) TEST FOR INTER-METAL LAYERS
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Available format(s): Hardcopy, PDF
Language(s): English
Published date: 01-01-2010
Publisher: National Standards Authority of Ireland
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.Only cited Standards give presumption of conformance to New Approach Directives/Regulations.Dates of withdrawal of national standards are available from NSAI.
FOREWORD1 Scope2 Terms and definitions3 Test equipment4 Test samples5 Procedures6 Lifetime estimation7 Lifetime dependence on inter-metal layer area8 SummaryAnnex A (informative) - Engineering supplementation for lifetime estimationBibliography
Specifies a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.
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