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    I.S. EN ISO 14644-15:2017

    Current The latest, up-to-date edition.

    CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION (ISO 14644-15:2017)

    Available format(s):  Hardcopy, PDF

    Language(s):  English

    Published date:  01-01-2017

    Publisher:  National Standards Authority of Ireland

    For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
    Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

    Dates of withdrawal of national standards are available from NSAI.

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    Table of Contents - (Show below) - (Hide below)

    National Foreword
    European foreword
    Foreword
    Introduction
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 Symbols
    5 Test setup
    6 Representative mode
    7 Visual inspection
    8 Test description
    9 Calculation of the measured concentrations
    10 Calculation of specific emission rate
    11 Assessment
    12 Documentation
    Annex A (informative) - Example calculation for
            suitability assessment of one equipment
            (existing installation)
    Annex B (informative) - Example calculation for
            suitability assessment of wall material
            (existing cleanroom/clean zone installation)
    Annex C (informative) - Suitability assessment of a
            combination of equipment and floor
            material in a cleanroom to be designed
    Bibliography

    Abstract - (Show below) - (Hide below)

    Defines requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher National Standards Authority of Ireland
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    IEST RP CC002 : 1998 RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES
    SAE AIR1167:1970 ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
    ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    IEST RP CC026.2 : 2004 CLEANROOM OPERATIONS
    ISO 8573-8:2004 Compressed air — Part 8: Test methods for solid particle content by mass concentration
    SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
    ISO 14644-14:2016 Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
    ISO 2889:2010 Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities
    IEST RP CC013 : 86-T EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES
    ISO 16000-9:2006 Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    ISO 16000-6:2011 Indoor air Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA sorbent, thermal desorption and gas chromatography using MS or MS-FID
    SEMI F28 : 2003(R2015) TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
    IEST RP CC028.1 : 2002
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