IEC 60747-14-3:2009

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terminology and letter symbols
  3.1 General terms
      3.1.1 Semiconductor pressure sensors
      3.1.2 Sensing methods
  3.2 Definitions
  3.3 Letter symbols
      3.3.1 General
      3.3.2 List of letter symbols
4 Essential ratings and characteristics
  4.1 General
      4.1.1 Sensor materials - for piezoelectrical sensors
      4.1.2 Handling precautions
      4.1.3 Types
  4.2 Ratings (limiting values)
      4.2.1 Pressures
      4.2.2 Temperatures
      4.2.3 Voltage
  4.3 Characteristics
      4.3.1 Full-scale span (V[FSS])
      4.3.2 Full-scale output (V[FSO])
      4.3.3 Sensitivity (S)
      4.3.4 Temperature coefficient of full-scale sensitivity
       (alpha[s])
      4.3.5 Offset voltage (V[os])
      4.3.6 Temperature coefficient of offset voltage
            (alpha[vos])
      4.3.7 Pressure hysteresis of output voltage (H[ohp])
      4.3.8 Temperature hysteresis of output voltage (H[ohT])
      4.3.9 Response time
      4.3.10 Warm-up
      4.3.11 Dimensions
      4.3.12 Mechanical characteristics
5 Measuring methods
  5.1 General
      5.1.1 General precautions
      5.1.2 Measuring conditions
  5.2 Output voltage measurements
      5.2.1 Purpose
      5.2.2 Principles of measurement
  5.3 Sensitivity (S)
      5.3.1 Purpose
      5.3.2 Measuring procedure
      5.3.3 Specified conditions
  5.4 Temperature coefficient of sensitivity (alpha[s])
      5.4.1 Purpose
      5.4.2 Specified conditions
  5.5 Temperature coefficient of full-scale span
      (alpha V[FSS]) and maximum temperature deviation
      of full-scale span (delta V[FSS])
      5.5.1 Purpose
      5.5.2 Specified conditions
  5.6 Temperature coefficient of offset voltage
      (alpha V[os]) and (alpha V[os])
      5.6.1 Purpose
      5.6.2 Specified conditions
  5.7 Pressure hysteresis of output voltage (H[ohp])
      5.7.1 Purpose
      5.7.2 Circuit diagram and circuit description
      5.7.3 Specified conditions
  5.8 Temperature hysteresis of output voltage (H[ohT])
      5.8.1 Purpose
      5.8.2 Measuring procedure
      5.8.3 Specified conditions
  5.9 Linearity
      5.9.1 Purpose
      5.9.2 Specified conditions
      5.9.3 Measuring procedure

IEC 60747-14-3:2009 specifies requirements for semiconductor pressure sensors measuring absolute, gauge or differential pressures. The major technical change with regard to the previous edition is the addition of a new subclause 5.9 (measuring method of linearity).

This publication should be read in conjunction with IEC 60747-1:2006.