ISO 13095:2014
Current
The latest, up-to-date edition.
Surface Chemical Analysis Atomic force microscopy Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
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English
05-08-2014
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ISO 13095:2014 specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u0, where u0 is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.
| DevelopmentNote |
Supersedes ISO/DIS 13095. (08/2014)
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| DocumentType |
Standard
|
| Pages |
25
|
| PublisherName |
International Organization for Standardization
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| Status |
Current
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| Standards | Relationship |
| BS ISO 13095:2014 | Identical |
| 11/30199166 DC : 0 | BS ISO 11952 - SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - DETERMINATION OF GEOMETRIC QUANTITIES USING SPM - CALIBRATION OF MEASURING SYSTEMS |
| ISO 11039:2012 | Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate |
| ISO 18115-2:2013 | Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy |
| ISO 11952:2014 | Surface chemical analysis Scanning-probe microscopy Determination of geometric quantities using SPM: Calibration of measuring systems |
| ISO/TS 80004-4:2011 | Nanotechnologies — Vocabulary — Part 4: Nanostructured materials |
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