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ISO 18116:2005

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

View Superseded by

Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis

Available format(s)

PDF

Language(s)

French, English

Published date

22-08-2005

Withdrawn date

09-04-2025

Superseded by

ISO 20579-2:2025

€94.00
Excluding VAT

ISO 18116:2005 gives guidance on methods of mounting and surface treatment for a specimen about to undergo surface chemical analysis. It is intended for the analyst as an aid in understanding the specialized specimen-handling conditions required for analyses by techniques such as Auger electron spectroscopy, secondary-ion mass spectrometry, and X-ray photoelectron spectroscopy.

Committee
ISO/TC 201/SC 2
DevelopmentNote
Supersedes ISO/DIS 18116 (08/2005)
DocumentType
Standard
Pages
17
PublisherName
International Organization for Standardization
Status
Withdrawn
SupersededBy
UnderRevision

Standards Relationship
NF ISO 18116 : 2006 Identical
BS ISO 18116:2005 Identical
SAC GB/T 30815 : 2014 Identical
NEN ISO 18116 : 2005 Identical
AS ISO 18116-2006 Identical
JIS K 0154:2017 Identical

BS EN ISO 14644-10:2013 Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration
13/30261587 DC : 0 BS ISO 17862 - SURFACE CHEMICAL ANALYSIS - SECONDARY ION MASS SPECTROMETRY - LINEARITY OF INTENSITY SCALE IN SINGLE ION COUNTING TIME-OF-FLIGHT MASS ANALYSERS
ISO 18117:2009 Surface chemical analysis — Handling of specimens prior to analysis
I.S. EN ISO 14644-10:2013 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013)
ASTM E 2695 : 2009 Standard Guide for Interpretation of Mass Spectral Data Acquired with Time-of-Flight Secondary Ion Mass Spectroscopy (Withdrawn 2018)
ISO 17862:2013 Surface chemical analysis — Secondary ion mass spectrometry — Linearity of intensity scale in single ion counting time-of-flight mass analysers
ISO 14701:2011 Surface chemical analysis — X-ray photoelectron spectroscopy — Measurement of silicon oxide thickness
09/30184131 DC : 0 BS ISO 29081 - SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPORTING OF METHODS USED FOR CHARGE CONTROL AND CHARGE CORRECTION
BS ISO 16129:2012 Surface chemical analysis. X-ray photoelectron spectroscopy. Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
18/30368966 DC : 0 BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS
BS ISO 18117:2009 Surface chemical analysis. Handling of specimens prior to analysis
BS ISO 16242:2011 Surface chemical analysis. Recording and reporting data in Auger electron spectroscopy (AES)
10/30212265 DC : 0 BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS
ISO 13424:2013 Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
BS ISO 14701:2011 Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
DIN EN ISO 14644-10:2013-06 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
PD ISO/TR 14187:2011 Surface chemical analysis. Characterization of nanostructured materials
BS ISO 29081:2010 Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction
BS ISO 13424:2013 Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis
BS ISO 16243:2011 Surface chemical analysis. Recording and reporting data in X-ray photoelectron spectroscopy (XPS)
07/30172470 DC : 0 BS ISO 18117 - SURFACE CHEMICAL ANALYSIS - HANDLING OF SPECIMENS PRIOR TO ANALYSIS
11/30230635 DC : 0 BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER
ISO 10810:2010 Surface chemical analysis — X-ray photoelectron spectroscopy — Guidelines for analysis
BS ISO 17862:2013 Surface chemical analysis. Secondary ion mass spectrometry. Linearity of intensity scale in single ion counting time-of-flight mass analysers
ISO 16242:2011 Surface chemical analysis — Recording and reporting data in Auger electron spectroscopy (AES)
ISO 16243:2011 Surface chemical analysis — Recording and reporting data in X-ray photoelectron spectroscopy (XPS)
BS ISO 10810:2010 Surface chemical analysis. X-ray photoelectron spectroscopy. Guidelines for analysis
18/30368969 DC : 0 BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER
09/30191895 DC : 0 BS ISO 10810 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS
ISO 29081:2010 Surface chemical analysis — Auger electron spectroscopy — Reporting of methods used for charge control and charge correction
EN ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
11/30196563 DC : 0 BS EN ISO 14644-10 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CHEMICAL CLEANLINESS BY CHEMICAL CONCENTRATION
ISO 16129:2012 Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
ISO/TR 14187:2011 Surface chemical analysis — Characterization of nanostructured materials
UNE-EN ISO 14644-10:2014 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

ISO 18115:2001 Surface chemical analysis — Vocabulary

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€94.00
Excluding VAT