NBN EN 62047-1 : 2016
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS
Published date
12-01-2013
Publisher
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Specifies terms for micro-electromechanical devices including the process of production of such devices.
| DocumentType |
Standard
|
| PublisherName |
Belgian Standards
|
| Status |
Current
|
| Standards | Relationship |
| DIN EN 62047-1:2014-05 (Draft) | Identical |
| I.S. EN 62047-1:2016 | Identical |
| BS EN 62047-1:2016 | Identical |
| EN 62047-1:2016 | Identical |
| IEC 62047-1:2016 | Identical |
| SN EN 62047-1:2016 | Identical |
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