Name: SEMI C3 : 2017
Brand: SEMI
Availability: InStock

SPECIFICATIONS FOR GASES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to serve for gases to be used in the manufacture and processing of semiconductors and advanced electronic devices and circuits.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes and includes SEMI C3.38. (02/2005)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
Supersedes	SEMI C3.38 : 1989

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SEMI C3 : 2017