SEMI C44 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID
Superseded date
08-11-2018
Superseded by
Published date
12-01-2013
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Describes standardize requirements for sulfuric acid used in the semiconductor industry and testing procedures to support those standards.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1.16, SEMI C11-5, SEMI C7-8 & SEMI C8.8. (03/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
| SEMI C27 : 2018 | SPECIFICATIONS AND GUIDELINES FOR HYDROCHLORIC ACID |
| SEMI C18 : 2014 | SPECIFICATION FOR ACETIC ACID |
| SEMI C35 : 2018 | SPECIFICATIONS AND GUIDELINE FOR NITRIC ACID |
| SEMI C19 : 2014 | SPECIFICATION FOR ACETONE |
| SEMI M51 : 2012 | TEST METHOD FOR CHARACTERIZING SILICON WAFER BY GATE OXIDE INTEGRITY |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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