SEMI C69 : 2015
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TEST METHOD FOR THE DETERMINATION OF SURFACE AREAS OF POLYMER PELLETS
Published date
12-01-2013
Superseded date
08-02-2021
Superseded by
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Specifies a test method for the determination of the surface area of polymer pellets.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2011)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI C90 : 2015 | TEST METHOD AND SPECIFICATION FOR TESTING PERFLUOROALKOXY (PFA) MATERIALS USED IN LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
| SEMI F40-0699E(R2018) | PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION COMPONENTS FOR CHEMICAL TESTING |
| SEMI F57 : 2014 | SPECIFICATION FOR POLYMER MATERIALS AND COMPONENTS USED IN ULTRA PURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
| SEMI F48 : 2000(R2014) | TEST METHOD FOR DETERMINING TRACE METALS IN POLYMER MATERIALS |
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