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SEMI C90 : 2015

SEMI C90 : 2015

Current

Current

The latest, up-to-date edition.

TEST METHOD AND SPECIFICATION FOR TESTING PERFLUOROALKOXY (PFA) MATERIALS USED IN LIQUID CHEMICAL DISTRIBUTION SYSTEMS

Published date

02-11-2015

Publisher

Semiconductor Equipment & Materials Institute

Specifies perfluoroalkoxy (PFA) resin and component preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components and resin.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2015)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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