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SEMI C69 : 2015

SEMI C69 : 2015

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

TEST METHOD FOR THE DETERMINATION OF SURFACE AREAS OF POLYMER PELLETS

Superseded date

08-02-2021

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a test method for the determination of the surface area of polymer pellets.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2011)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI C90 : 2015 TEST METHOD AND SPECIFICATION FOR TESTING PERFLUOROALKOXY (PFA) MATERIALS USED IN LIQUID CHEMICAL DISTRIBUTION SYSTEMS

SEMI F40-0699E(R2018) PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION COMPONENTS FOR CHEMICAL TESTING
SEMI F57 : 2014 SPECIFICATION FOR POLYMER MATERIALS AND COMPONENTS USED IN ULTRA PURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS
SEMI F48 : 2000(R2014) TEST METHOD FOR DETERMINING TRACE METALS IN POLYMER MATERIALS

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