SEMI C90 : 2015
Current
Current
The latest, up-to-date edition.
TEST METHOD AND SPECIFICATION FOR TESTING PERFLUOROALKOXY (PFA) MATERIALS USED IN LIQUID CHEMICAL DISTRIBUTION SYSTEMS
Published date
02-11-2015
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Specifies perfluoroalkoxy (PFA) resin and component preparation and pretreatment procedures for chemical test methods used to evaluate liquid chemical distribution system components and resin.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2015)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI C69 : 2015 | TEST METHOD FOR THE DETERMINATION OF SURFACE AREAS OF POLYMER PELLETS |
| SEMI F57 : 2014 | SPECIFICATION FOR POLYMER MATERIALS AND COMPONENTS USED IN ULTRA PURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
| SEMI F48 : 2000(R2014) | TEST METHOD FOR DETERMINING TRACE METALS IN POLYMER MATERIALS |
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