SEMI D16 : 1998
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT
Published date
12-01-2013
Sorry this product is not available in your region.
Describes feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. Also describes mechanical features on or about the process tool port, and in front of or on the tool face.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI D5 : 1994(R2003) | STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D11 : 1995(R2009) | SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES |
Summarise
Access your standards online with a subscription
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.
Sorry this product is not available in your region.