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SEMI D11 : 1995(R2009)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES

Published date

12-01-2013

Pertains to cassettes that hold a quantity of rectangular FPD substrates. Selected terms and definitions and summary specifications are included. The specifications for single-substrate cassettes will be developed in other documents.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (07/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D25 : 2000E(R2006) SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATE SHIPPING CASE
SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES
SEMI D16 : 1998 SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT
SEMI D18 : 1999E SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES

SEMI D6 : 2011(R2017) SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK SUBSTRATES
SEMI D5 : 1994(R2003) STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI E1 : NOV 2010(R2016) SPECIFICATION FOR OPEN PLASTIC AND METAL WAFER CARRIERS
SEMI D3 : 1991(R2009) QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D21 : 2006(R2015) TERMINOLOGY FOR FPD MASK PATTERN ACCURACY
SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES

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