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SEMI
SEMI D16 : 1998

SEMI D16 : 1998

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes feature requirements on and about tool ports of process tools used in manufacturing of flat panel displays. Also describes mechanical features on or about the process tool port, and in front of or on the tool face.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D5 : 1994(R2003) STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
SEMI D11 : 1995(R2009) SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES

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