SEMI D21 : 2006(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TERMINOLOGY FOR FPD MASK PATTERN ACCURACY
Superseded date
08-03-2021
Superseded by
Published date
12-01-2013
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Describes terminology for FPD masks. Also intended that the concepts of terms which should be used at the technical conferences, business discussion, etc are clarified and that standardization as to masks will be promoted.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI D13 : 2008(R2013) | TERMINOLOGY FOR FPD COLOR FILTERS ASSEMBLIES |
| BS IEC 62899-301-2:2017 | Printed electronics Equipment. Contact printing. Rigid master. Measurement method of plate master pattern dimension |
| 14/30317965 DC : 0 | BS EN 62903-2 ED.1 - PRINTED ELECTRONICS - EQUIPMENT - CONTACT PRINTING - RIGID MASTER - PART 2: MEASUREMENT METHOD OF PLATE MASTER PATTERN DIMENSION |
| SEMI D11 : 1995(R2009) | SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES |
| SEMI D18 : 1999E | SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES |
| IEC 62899-301-2:2017 | Printed electronics - Part 301-2: Equipment - Contact printing - Rigid master - Measurement method of plate master pattern dimension |
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