SEMI D18 : 1999E

Defines cassettes used for horizontal transportation and storage of glass substrates 0.7 mm - 1.1 mm thick (max) in a flat display manufacturing facility. The standard is aimed at setting an appropriate level of specification that places minimal limits on innovation at the same time as ensuring modularity and inter- changeability at all mechanical interfaces. In this specification most of the requirements are in the form of algebraic expressions specifying maximum or minimum measurements referenced from the length and width of the intended substrate withfew required surfaces. Only the mechanical interfaces for cassettes are specified; no materials requirements or micro-contamination limits are given. This standard has been written so that cassettes of various materials & designs may be produced in compliance with it.