SEMI D27 : 2000
Current
Current
The latest, up-to-date edition.
GUIDE FOR FLAT PANEL DISPLAY EQUIPMENT COMMUNICATION INTERFACES
Published date
12-01-2013
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Provides guidelines for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility. Includes references to other SEMI standards. Also includes definitions and explanations specific to FPD equipment automation.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E23 : 2004(R2010) | SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE |
| SEMI E37.1 : 2002(R2013) | HIGH-SPEED SECS MESSAGE SERVICES SINGLE SELECTED-SESSION MODE (HSMS-SS) |
| SEMI E4 : 1999(R2007) | SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
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