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SEMI E23 : 2004(R2010)

SEMI E23 : 2004(R2010)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Covers the parallel I/O interface for the cassette transfer between two pieces of equipment, such as a piece of process equipment and a piece of transport equipment. Also describes the wire-connected parallel I/O interface between two pieces of equipment and the photo-coupled parallel I/O interface between the process equipment and the transport equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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