SEMI E109 : 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS)
Superseded date
15-07-2023
Superseded by
Published date
12-01-2013
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Specifies standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E99 : 2017 | SPECIFICATION FOR CARRIER ID READER/WRITER |
| SEMI E100 : 2004(R2010) | SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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