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  • SEMI E100 : 2004(R2010)

    Current The latest, up-to-date edition.

    SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Describes the Reticle SMIF Pod (RSP) used to transport and store 6 inch or 230 mm reticles in a reticle (photomask) or integrated circuit (IC) manufacturing facility.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI E109 : 2017 SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS)
    SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
    SEMI E117 : 2017 SPECIFICATION FOR RETICLE LOAD PORT
    SEMI S28 : 2011 SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI E152 : 2014 MECHANICAL SPECIFICATION OF EUV POD FOR 150 MM EUVL RETICLES

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E19.4 : 2017 SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF)
    SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
    SEMI P5 : 2016 SPECIFICATION FOR PELLICLES
    SEMI E57 : 2000E2(R2010) SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
    SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
    SEMI E30.1 : 2017 SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
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