SEMI E15 : 1998E2(R2016)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR TOOL LOAD PORT
Published date
12-01-2013
Pertains to unify the interface between process/inspection tools and automated wafer carrier transport systems while maintaining compatibility with human transport.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) E = This specification was editorially modified in November 2004 to correct an editorial error. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E171 : FEB 2016 | SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL) |
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| SEMI E101 : 2004(R2010) | GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL |
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