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SEMI E109 : 2017

SEMI E109 : 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS)

Superseded date

15-07-2023

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (06/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E99 : 2017 SPECIFICATION FOR CARRIER ID READER/WRITER
SEMI E100 : 2004(R2010) SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES
SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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