SEMI E128 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR XML MESSAGE STRUCTURES
11-03-2024
12-01-2013
Describes XML structures required to encode message header or 'envelope' information for synchronous and asynchronous messages. XML is used in software applications to encode information with tags that provide structure and data type information specified in XML Schemas.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2003)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E132.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION (ECA) |
| SEMI E132 : 2015 | SPECIFICATION FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION |
| SEMI E134.1 : 2014 | SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM) |
| SEMI E160 : 2011(R2017) | SPECIFICATION FOR COMMUNICATION OF DATA QUALITY |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E139.3 : 2011 | XML/SOAP BINDING FOR RECIPE AND PARAMETER MANAGEMENT |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E125.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E134 : 2014 | SPECIFICATION FOR DATA COLLECTION MANAGEMENT |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
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