Name: SEMI E160 : 2011(R2017)
Brand: SEMI

SPECIFICATION FOR COMMUNICATION OF DATA QUALITY

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a generally acceptable specification for communicating the quality of semiconductor equipment data.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (03/2011)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI E160 : 2011(R2017)