SEMI E130 : 2017
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300)
Published date
12-01-2013
Sorry this product is not available in your region.
Sets up a Prober Specific Equipment Model for prober equipment deployed in a factory adhering to the Global Joint Guidance for 300 mm Standards (PSEM300).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Includes SEMI E130.1. (10/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SupersededBy |
| SEMI E130.1 : 2004(R2010) | SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| SEMI T13 : 2004(R2010) | SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E42 : 2004 | RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND MESSAGE SERVICES |
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
| SEMI G81 : 2007(R2015) | SPECIFICATION FOR MAP DATA ITEMS |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI G85 : JUL 2003 | SPECIFICATION FOR MAP DATA FORMAT |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.