SEMI E134.1 : 2014
Current
The latest, up-to-date edition.
SPECIFICATION FOR SOAP BINDING OF DATA COLLECTION MANAGEMENT (DCM)
12-01-2013
Specifies an implementation mapping of the SEMI E134 specification for Data Collection Management to the SOAP 1.2 protocol. Also provides a description of the XML Schema data types used to support the UML classes defined in SEMI E134, and also describes the WSDL port type and binding definitions used to support the operations defined by the interfaces specified in SEMI E134.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Not available separately, Published within the SEMI E134 family of standards. (02/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E128 : 2014 | SPECIFICATION FOR XML MESSAGE STRUCTURES |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E125.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E132.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION (ECA) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E120.1 : 2014 | SPECIFICATION FOR THE COMMON EQUIPMENT MODEL (CEM) |
| SEMI E121 : 2017 | GUIDE FOR STYLE AND USAGE OF XML FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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